At Katon®, we understand that the electronics, electrical, and semiconductor industries require the highest standards of reliability and precision. Our sealing solutions are engineered to withstand extreme conditions and provide dependable performance, ensuring your equipment operates smoothly. Whether it's for electrical applications, semiconductor manufacturing equipment or post manufacturing pipelines, we’ve designed our products to meet the demanding needs of these critical industries.
Semiconductor deposition processes such as CVD (Chemical Vapor Deposition), LPCVD and PECVD, etc. expose elastomer seals to elevated temperatures, vacuum conditions, and chemically reactive gases. Maintaining process stability, tool uptime, and wafer yield requires sealing materials that can withstand both thermal and chemical stress while maintaining its integrity. The Katon® FFKM O-ring compounds in this catagory are specifically engineered for low particle generation deposition environments. Our products are optimized for long-term stability under deposition process conditions—delivering low outgassing, high thermal resistance, and minimal particle generation to ensure clean chamber operation and consistent thin-film performance.
| Katon® Compound | Base Polymer | Color | Shore A (±5) | Operating Temperature | Curing System |
|---|---|---|---|---|---|
| Katon® 7175C | FFKM | OFF-WHITE | 78 | -10℃~230℃/14℉~446℉ | Peroxide |
| Katon® 8175C | FFKM | UMBER | 77 | -10℃~290℃/14℉~554℉ | Peroxide |
| Katon® 9175C | FFKM | DARK AMBER | 72 | -10℃~317℃/14℉~602℉ | Triazine |
Plasma Degradation Benchmarking
Due to the lack of a universal industry standard for characterizing elastomer resistance to plasma environments, OEMs and semiconductor fabs typically rely on in-site performance data and real-world testing.
At Katon, we are committed to providing more than just high-quality O-Rings. We offer a complete customer experience from start to finish. Our services include:
Whether you’re looking for standard O-Rings or specialized custom seals, Katon® is here to help you find the right solution, every time.
